Particle control for semiconductor manufacturing /
16
| Main Author: | |
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| Format: | |
| Published: |
New York : Marcel Dekker, Inc.,
1990
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| Subjects: |
| _version_ | 1826381207305191424 |
|---|---|
| author | Donovan, R. P. |
| author_facet | Donovan, R. P. |
| author_sort | Donovan, R. P. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T18:57:29Z |
| format | |
| id | KOHA-OAI-TEST:129631 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T18:57:29Z |
| publishDate | 1990 |
| publisher | New York : Marcel Dekker, Inc., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1296312020-12-19T17:02:56ZParticle control for semiconductor manufacturing / Donovan, R. P. New York : Marcel Dekker, Inc.,199016PSZJBLSemiconductorsSemiconductorsParticlesURN:ISBN:0824782429 |
| spellingShingle | Semiconductors Semiconductors Particles Donovan, R. P. Particle control for semiconductor manufacturing / |
| title | Particle control for semiconductor manufacturing / |
| title_full | Particle control for semiconductor manufacturing / |
| title_fullStr | Particle control for semiconductor manufacturing / |
| title_full_unstemmed | Particle control for semiconductor manufacturing / |
| title_short | Particle control for semiconductor manufacturing / |
| title_sort | particle control for semiconductor manufacturing |
| topic | Semiconductors Semiconductors Particles |
| work_keys_str_mv | AT donovanrp particlecontrolforsemiconductormanufacturing |