Analysis and design principles of MEMS devices /
16
| Hlavní autor: | |
|---|---|
| Médium: | |
| Jazyk: | eng |
| Vydáno: |
Amsterdam : Elsevier Science,
2005
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| Témata: |
| _version_ | 1826382760721252352 |
|---|---|
| author | 443945 Bao, Min-Hang |
| author_facet | 443945 Bao, Min-Hang |
| author_sort | 443945 Bao, Min-Hang |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T19:20:16Z |
| format | |
| id | KOHA-OAI-TEST:137240 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T19:20:16Z |
| publishDate | 2005 |
| publisher | Amsterdam : Elsevier Science, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1372402020-12-19T17:03:16ZAnalysis and design principles of MEMS devices / 443945 Bao, Min-Hang Amsterdam : Elsevier Science,2005eng16PSZJBLMicroelectromechanical systemsURN:ISBN:0444516166 (hbk.) |
| spellingShingle | Microelectromechanical systems 443945 Bao, Min-Hang Analysis and design principles of MEMS devices / |
| title | Analysis and design principles of MEMS devices / |
| title_full | Analysis and design principles of MEMS devices / |
| title_fullStr | Analysis and design principles of MEMS devices / |
| title_full_unstemmed | Analysis and design principles of MEMS devices / |
| title_short | Analysis and design principles of MEMS devices / |
| title_sort | analysis and design principles of mems devices |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT 443945baominhang analysisanddesignprinciplesofmemsdevices |