Analysis and design principles of MEMS devices /

Eitemau Tebyg

• MEMS and NEMS : systems, devices, and structures /
  gan: 290823 Lyshevski, Sergey Edward
  Cyhoeddwyd: (2002)
• Photonic MEMS devices : design, fabrication and control /
  gan: 385069 Ai-Qun Liu
  Cyhoeddwyd: (2009)
• Advanced mechatronics and MEMS devices /
  gan: Zhang, Dan
  Cyhoeddwyd: (c201)
• Scaling issues and design of MEMS /
  gan: 303337 Baglio, Salvatore, et al.
  Cyhoeddwyd: (2007)
• System-level modeling of MEMS /
  gan: Bechtold, T. (Tamara), et al.
  Cyhoeddwyd: (2013)