Surfaces, interfaces, and thin films for microelectronics /
Nazri Kamsah;
| Main Author: | |
|---|---|
| Format: | text |
| Language: | eng |
| Published: |
Hoboken, NJ : Wiley-Interscience,
2008
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| Subjects: |
| _version_ | 1796673451048566784 |
|---|---|
| author | 267883 Irene, Eugene A. |
| author_facet | 267883 Irene, Eugene A. |
| author_sort | 267883 Irene, Eugene A. |
| collection | OCEAN |
| description | Nazri Kamsah; |
| first_indexed | 2024-03-04T19:31:01Z |
| format | text |
| id | KOHA-OAI-TEST:140766 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T19:31:01Z |
| publishDate | 2008 |
| publisher | Hoboken, NJ : Wiley-Interscience, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1407662022-05-18T09:20:30ZSurfaces, interfaces, and thin films for microelectronics / 267883 Irene, Eugene A. textHoboken, NJ : Wiley-Interscience,2008engNazri Kamsah;PSZJBLSurface chemistryInterfaces (Physical sciences)Thin filmsMicroelectronicsURN:ISBN:9780470174470 (hbk.) |
| spellingShingle | Surface chemistry Interfaces (Physical sciences) Thin films Microelectronics 267883 Irene, Eugene A. Surfaces, interfaces, and thin films for microelectronics / |
| title | Surfaces, interfaces, and thin films for microelectronics / |
| title_full | Surfaces, interfaces, and thin films for microelectronics / |
| title_fullStr | Surfaces, interfaces, and thin films for microelectronics / |
| title_full_unstemmed | Surfaces, interfaces, and thin films for microelectronics / |
| title_short | Surfaces, interfaces, and thin films for microelectronics / |
| title_sort | surfaces interfaces and thin films for microelectronics |
| topic | Surface chemistry Interfaces (Physical sciences) Thin films Microelectronics |
| work_keys_str_mv | AT 267883ireneeugenea surfacesinterfacesandthinfilmsformicroelectronics |