Resolution enhancement techniques in optical lithography /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Bellingham, WA : SPIE Press,
2001
|
| Subjects: |
| _version_ | 1826390959269609472 |
|---|---|
| author | 306713 Wong, Alfred Kwok-Kit |
| author_facet | 306713 Wong, Alfred Kwok-Kit |
| author_sort | 306713 Wong, Alfred Kwok-Kit |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T21:18:20Z |
| format | |
| id | KOHA-OAI-TEST:176444 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T21:18:20Z |
| publishDate | 2001 |
| publisher | Bellingham, WA : SPIE Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1764442020-12-19T17:04:50ZResolution enhancement techniques in optical lithography / 306713 Wong, Alfred Kwok-Kit Bellingham, WA : SPIE Press,2001eng16PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:0819439959 (pbk.)URN:ISBN:9780819439956 (pbk.) |
| spellingShingle | Integrated circuits Microlithography 306713 Wong, Alfred Kwok-Kit Resolution enhancement techniques in optical lithography / |
| title | Resolution enhancement techniques in optical lithography / |
| title_full | Resolution enhancement techniques in optical lithography / |
| title_fullStr | Resolution enhancement techniques in optical lithography / |
| title_full_unstemmed | Resolution enhancement techniques in optical lithography / |
| title_short | Resolution enhancement techniques in optical lithography / |
| title_sort | resolution enhancement techniques in optical lithography |
| topic | Integrated circuits Microlithography |
| work_keys_str_mv | AT 306713wongalfredkwokkit resolutionenhancementtechniquesinopticallithography |