Plasma etching of films at high rates /

Plasma etching of films at high rates /

PSZJBL

Bibliographic Details
Main Author:	427147 Heinecke, R. A. H.
Format:
Subjects:	Plasma (Ionized gases) Aluminum film

Similar Items

Characterization of plasma etching for semiconductor applications /
by: 451936 Kumar, Rakesh, et al.

Chemically selective, anisotropic plasma etching /
by: 449300 Bersin, Richard L.

Effective emission and ionization rate coefficients of atomic carbons in plasmas /
by: Ohkouchi, Y.
Published: (1993)

Theoretical and computational plasma physics/
Published: (1978)

Computational Plasma Physics : With Applications to Fusion and Astrophysics /
by: Tajima, Toshiki, author 211105
Published: (1989)

Physics and applications of high temperature and dense plasmas produced by pulsed power /
by: Akiyama, H, et al.
Published: (1999)

Plasma physics/
by: Griem, Hans R., et al.
Published: (1970)

Basic plasma physics/
by: Galeev, A. A., et al.
Published: (1983)

Plasma physics : physique des plasmas/
by: DeWitt-Morette, Cecile, et al.
Published: (1975)

Introduction to plasma physics /
by: 389353 Goldston, Robert J., et al.
Published: (1995)

Fundamentals of Plasma Physics /
by: 431210 Seshadri, S. R.
Published: (1973)

Introduction to plasma theory/
by: 455271 Nicholson, Dwight R
Published: (1983)

Principles of plasma physics/
by: 260669 Krall, Nicholas A., et al.
Published: (1973)

Introduction to plasma physics / [disket]
by: 389353 Goldston, Robert J., et al.
Published: (1995)

Fundamentals of plasma physics /
by: 235753 Bittencourt, J. A.
Published: (2004)

Reviews of plasma physics
by: 265903 Leontovich, M. A.
Published: (1965)

Reviews of plasma physics/
by: 265903 Leontovich, M. A.
Published: (1965)

Small plasma physics experiments /
by: Symposium on Small Scale Laboratory Plasma Experiments (1987 : Trieste, Italy), et al.
Published: (1988)

Plasma physics
Published: (1971)

The physics of plasmas /
by: 257536 Boyd, T. J. M., et al.
Published: (2003)

Plasma physics /
by: 210373 Chandrasekhar, Subrahmanyan, et al.
Published: (1960)

Plasma physics/
by: Keen, B. E.
Published: (1974)

Plasma physics /
by: Skobel'tsyn, D. V. (Dmitrii Vladimirovich), 1892-
Published: (1968)

Physics of plasmas /
by: 198883 Woods, L. C. (Leslie Colin), 1922-
Published: (2004)

The plasma state/
by: 254261 Shohet, Juda Leon
Published: (1971)

Plasma physics;
Published: (1970)

Advanced space plasma physics /
by: 335375 Treumann, Rudolf A., et al.
Published: (1997)

Small plasma Physics experiments 2
by: 477731 Symposium on Small Scale Laboratory Plasma Experiments (1989 :Trieste, Italy), et al.
Published: (1990)

Numerical simulation of plasmas/
by: 218258 Dnestrovskii, Y. N., et al.
Published: (1986)

Journal of plasma physics
Published: (1967)

Reviews of plasma physics /
by: Kadomtsev, Acad B. B.
Published: (1989)

Introduction to plasma physics /
by: Smirnov, B. M. (Boris Mikhailovich), 1938-
Published: (1977)

An introduction to plasma processing /
by: 435490 Bell, Alexis T.

Introduction to Plasma Physics /
by: Belmont, Gerard, author 648811, et al.
Published: (2019)

Fundamentals of plasma physics /
by: Bellan, Paul Murray, 1948-
Published: (2006)

Introduction to plasma physics /
by: 346707 Chen, Francis F.
Published: (1974)

The particle kinetics of the plasmas/
by: 254323 Shkarofsky, I. P., et al.
Published: (1966)

Nonlinear effects in plasmas/
by: Orsay Summer Institute (2nd : 1966), et al.
Published: (1969)

Theory of the unmagnetized plasma/
by: 256207 Montgomery, David C., et al.
Published: (1971)

An introduction to plasma physics /
by: 215421 Thompson, W. B.
Published: (1962)