APA-referens (7:e uppl.)

427692 Jacob, A. The versatile technique of Rf plasma etching: Mechanistic considerations for selective etching.

Chicago-referens (17:e uppl.)

427692 Jacob, Adir. The Versatile Technique of Rf Plasma Etching: Mechanistic Considerations for Selective Etching.

MLA-referens (9:e uppl.)

427692 Jacob, Adir. The Versatile Technique of Rf Plasma Etching: Mechanistic Considerations for Selective Etching.

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