Chemically selective, anisotropic plasma etching /
PSZJBL
| Main Author: | |
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| Format: | |
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| _version_ | 1796682296859820032 |
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| author | 449300 Bersin, Richard L. |
| author_facet | 449300 Bersin, Richard L. |
| author_sort | 449300 Bersin, Richard L. |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-04T21:40:17Z |
| format | |
| id | KOHA-OAI-TEST:183773 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T21:40:17Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1837732020-12-19T17:05:06ZChemically selective, anisotropic plasma etching / 449300 Bersin, Richard L. PSZJBLPlasma (Ionized gases)Anisotropy |
| spellingShingle | Plasma (Ionized gases) Anisotropy 449300 Bersin, Richard L. Chemically selective, anisotropic plasma etching / |
| title | Chemically selective, anisotropic plasma etching / |
| title_full | Chemically selective, anisotropic plasma etching / |
| title_fullStr | Chemically selective, anisotropic plasma etching / |
| title_full_unstemmed | Chemically selective, anisotropic plasma etching / |
| title_short | Chemically selective, anisotropic plasma etching / |
| title_sort | chemically selective anisotropic plasma etching |
| topic | Plasma (Ionized gases) Anisotropy |
| work_keys_str_mv | AT 449300bersinrichardl chemicallyselectiveanisotropicplasmaetching |