Applications of reactive plasma practical microelectronic processing systems /
PSZJBL
| Main Authors: | , |
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| Format: | |
| Subjects: |
| _version_ | 1826392518040748032 |
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| author | 449445 Maddox, R. L. Parker, H. L. |
| author_facet | 449445 Maddox, R. L. Parker, H. L. |
| author_sort | 449445 Maddox, R. L. |
| collection | OCEAN |
| description | PSZJBL |
| first_indexed | 2024-03-04T21:40:22Z |
| format | |
| id | KOHA-OAI-TEST:183801 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T21:40:22Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1838012020-12-19T17:05:06ZApplications of reactive plasma practical microelectronic processing systems / 449445 Maddox, R. L. Parker, H. L. PSZJBLPlasma (Ionized gases)Microelectronics |
| spellingShingle | Plasma (Ionized gases) Microelectronics 449445 Maddox, R. L. Parker, H. L. Applications of reactive plasma practical microelectronic processing systems / |
| title | Applications of reactive plasma practical microelectronic processing systems / |
| title_full | Applications of reactive plasma practical microelectronic processing systems / |
| title_fullStr | Applications of reactive plasma practical microelectronic processing systems / |
| title_full_unstemmed | Applications of reactive plasma practical microelectronic processing systems / |
| title_short | Applications of reactive plasma practical microelectronic processing systems / |
| title_sort | applications of reactive plasma practical microelectronic processing systems |
| topic | Plasma (Ionized gases) Microelectronics |
| work_keys_str_mv | AT 449445maddoxrl applicationsofreactiveplasmapracticalmicroelectronicprocessingsystems AT parkerhl applicationsofreactiveplasmapracticalmicroelectronicprocessingsystems |