Modeling of ion implantation in VLSI fabrication process /
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Singapore : [s.n] ,
1993
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| _version_ | 1826393108118503424 |
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| author | Razali Ismail, 1958- International Symposium on IC Technology, Systems and Applications (5th : 1993 : Singapore) |
| author_facet | Razali Ismail, 1958- International Symposium on IC Technology, Systems and Applications (5th : 1993 : Singapore) |
| author_sort | Razali Ismail, 1958- |
| collection | OCEAN |
| description | 12 |
| first_indexed | 2024-03-04T21:49:04Z |
| format | |
| id | KOHA-OAI-TEST:186579 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T21:49:04Z |
| publishDate | 1993 |
| publisher | Singapore : [s.n] , |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1865792020-12-19T17:05:12ZModeling of ion implantation in VLSI fabrication process / Razali Ismail, 1958- International Symposium on IC Technology, Systems and Applications (5th : 1993 : Singapore) Singapore : [s.n] ,199312PSZJBLIon implantationIntegrated circuits |
| spellingShingle | Ion implantation Integrated circuits Razali Ismail, 1958- International Symposium on IC Technology, Systems and Applications (5th : 1993 : Singapore) Modeling of ion implantation in VLSI fabrication process / |
| title | Modeling of ion implantation in VLSI fabrication process / |
| title_full | Modeling of ion implantation in VLSI fabrication process / |
| title_fullStr | Modeling of ion implantation in VLSI fabrication process / |
| title_full_unstemmed | Modeling of ion implantation in VLSI fabrication process / |
| title_short | Modeling of ion implantation in VLSI fabrication process / |
| title_sort | modeling of ion implantation in vlsi fabrication process |
| topic | Ion implantation Integrated circuits |
| work_keys_str_mv | AT razaliismail1958 modelingofionimplantationinvlsifabricationprocess AT internationalsymposiumonictechnologysystemsandapplications5th1993singapore modelingofionimplantationinvlsifabricationprocess |