Hazard assessment and control technology in semiconductor manufacturing
| Main Author: | |
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| Format: | |
| Language: | eng |
| Published: |
Chelsea, Mich. : Lewis Pub
1989
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| Subjects: |
| _version_ | 1826393854703566848 |
|---|---|
| author | American Conference of Governmental Industrial |
| author_facet | American Conference of Governmental Industrial |
| author_sort | American Conference of Governmental Industrial |
| collection | OCEAN |
| description | |
| first_indexed | 2024-03-04T21:59:32Z |
| format | |
| id | KOHA-OAI-TEST:190068 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T21:59:32Z |
| publishDate | 1989 |
| publisher | Chelsea, Mich. : Lewis Pub |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1900682020-12-19T17:05:19ZHazard assessment and control technology in semiconductor manufacturing American Conference of Governmental Industrial Chelsea, Mich. : Lewis Pub 1989eng14PSZJBLSemiconductor industryURN:ISBN:0873711327 |
| spellingShingle | Semiconductor industry American Conference of Governmental Industrial Hazard assessment and control technology in semiconductor manufacturing |
| title | Hazard assessment and control technology in semiconductor manufacturing |
| title_full | Hazard assessment and control technology in semiconductor manufacturing |
| title_fullStr | Hazard assessment and control technology in semiconductor manufacturing |
| title_full_unstemmed | Hazard assessment and control technology in semiconductor manufacturing |
| title_short | Hazard assessment and control technology in semiconductor manufacturing |
| title_sort | hazard assessment and control technology in semiconductor manufacturing |
| topic | Semiconductor industry |
| work_keys_str_mv | AT americanconferenceofgovernmentalindustrial hazardassessmentandcontroltechnologyinsemiconductormanufacturing |