EUV lithography /
40
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Bellingham, Washington : Wiley,
2008
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| Subjects: |
| _version_ | 1796684585199730688 |
|---|---|
| author | Bakshi, Vivek |
| author_facet | Bakshi, Vivek |
| author_sort | Bakshi, Vivek |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-04T22:14:14Z |
| format | |
| id | KOHA-OAI-TEST:194943 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T22:14:14Z |
| publishDate | 2008 |
| publisher | Bellingham, Washington : Wiley, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1949432020-12-19T17:05:30ZEUV lithography / Bakshi, Vivek Bellingham, Washington : Wiley,2008eng40PSZJBLUltraviolet radiationPhotolithographyOptical coatingsURN:ISBN:9780470471555 (hbk.) |
| spellingShingle | Ultraviolet radiation Photolithography Optical coatings Bakshi, Vivek EUV lithography / |
| title | EUV lithography / |
| title_full | EUV lithography / |
| title_fullStr | EUV lithography / |
| title_full_unstemmed | EUV lithography / |
| title_short | EUV lithography / |
| title_sort | euv lithography |
| topic | Ultraviolet radiation Photolithography Optical coatings |
| work_keys_str_mv | AT bakshivivek euvlithography |