Optical inspection of microsystems /
22
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Boca Raton, FL : CRC,
2007
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| Subjects: |
| _version_ | 1826396047924002816 |
|---|---|
| author | Osten, Wolfgang |
| author_facet | Osten, Wolfgang |
| author_sort | Osten, Wolfgang |
| collection | OCEAN |
| description | 22 |
| first_indexed | 2024-03-04T22:30:50Z |
| format | |
| id | KOHA-OAI-TEST:200512 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T22:30:50Z |
| publishDate | 2007 |
| publisher | Boca Raton, FL : CRC, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2005122020-12-19T17:05:43ZOptical inspection of microsystems / Osten, Wolfgang Boca Raton, FL : CRC,2007eng22PSZJBLOptical detectorsMicroelectronicsQuality controlURN:ISBN:9780849336829 (hbk.) |
| spellingShingle | Optical detectors Microelectronics Quality control Osten, Wolfgang Optical inspection of microsystems / |
| title | Optical inspection of microsystems / |
| title_full | Optical inspection of microsystems / |
| title_fullStr | Optical inspection of microsystems / |
| title_full_unstemmed | Optical inspection of microsystems / |
| title_short | Optical inspection of microsystems / |
| title_sort | optical inspection of microsystems |
| topic | Optical detectors Microelectronics Quality control |
| work_keys_str_mv | AT ostenwolfgang opticalinspectionofmicrosystems |