MEMS : design and fabrication /

MEMS : design and fabrication /

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Detalles Bibliográficos
Autor principal:	Gad-el-Hak, Mohamed, 1945-
Formato:
Lenguaje:	eng
Publicado:	Boca Raton, FL : CRC/Taylor & Francis, 2006
Materias:	Microelectromechanical systems Microfabrication

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