Design and modeling of a 2x2 MEMs optical switch based on electrostatic actuation /

Design and modeling of a 2x2 MEMs optical switch based on electrostatic actuation /

16

Dades bibliogràfiques
Autors principals:	361243 Leow, Cheah Wei, Abu Bakar Mohammad, 1959-, Norazan Mohd. Kassim, IEEE National Symposium on Microelectronics (NSM 2001) (2001 : Genting Highlands)
Format:
Idioma:	eng
Publicat:	Skudai : Universiti Teknologi Malaysia, 2001
Matèries:	Microelectromechanical systems

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