Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France /

Optical micro- and nanometrology in microsystems technology : 5-7 April 2006, Strasbourg, France /

40

Detalhes bibliográficos
Principais autores:	Gorecki, Christophe, Asundi, Amand K., Osten, Wolfgang, The International Society for Optical Engineering
Formato:
Idioma:	eng
Publicado em:	Bellingham, WA : SPIE Press, 2006
Assuntos:	Optical measurements

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