Precision micro-mahining of silicon and glass /
20
| Main Authors: | , , , , |
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| Format: | |
| Language: | eng |
| Published: |
Skudai : Universiti Teknologi Malaysia,
2002
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| Subjects: |
| _version_ | 1796694300794290176 |
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| author | Venkatesh, V. C. (Vellore Chelvaraj) Izman Sudin Safian Sharif Mohamed Konneh IEEE International Conference on Industrial Technology (2002 : Bangkok, Thailand) |
| author_facet | Venkatesh, V. C. (Vellore Chelvaraj) Izman Sudin Safian Sharif Mohamed Konneh IEEE International Conference on Industrial Technology (2002 : Bangkok, Thailand) |
| author_sort | Venkatesh, V. C. (Vellore Chelvaraj) |
| collection | OCEAN |
| description | 20 |
| first_indexed | 2024-03-05T00:34:35Z |
| format | |
| id | KOHA-OAI-TEST:241701 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T00:34:35Z |
| publishDate | 2002 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2417012020-12-19T17:07:26ZPrecision micro-mahining of silicon and glass / Venkatesh, V. C. (Vellore Chelvaraj) Izman Sudin Safian Sharif Mohamed Konneh IEEE International Conference on Industrial Technology (2002 : Bangkok, Thailand) Skudai : Universiti Teknologi Malaysia,2002eng20PSZJBLGrinding and polishingMachining |
| spellingShingle | Grinding and polishing Machining Venkatesh, V. C. (Vellore Chelvaraj) Izman Sudin Safian Sharif Mohamed Konneh IEEE International Conference on Industrial Technology (2002 : Bangkok, Thailand) Precision micro-mahining of silicon and glass / |
| title | Precision micro-mahining of silicon and glass / |
| title_full | Precision micro-mahining of silicon and glass / |
| title_fullStr | Precision micro-mahining of silicon and glass / |
| title_full_unstemmed | Precision micro-mahining of silicon and glass / |
| title_short | Precision micro-mahining of silicon and glass / |
| title_sort | precision micro mahining of silicon and glass |
| topic | Grinding and polishing Machining |
| work_keys_str_mv | AT venkateshvcvellorechelvaraj precisionmicromahiningofsiliconandglass AT izmansudin precisionmicromahiningofsiliconandglass AT safiansharif precisionmicromahiningofsiliconandglass AT mohamedkonneh precisionmicromahiningofsiliconandglass AT ieeeinternationalconferenceonindustrialtechnology2002bangkokthailand precisionmicromahiningofsiliconandglass |