Precision micro-mahining of silicon and glass /

Precision micro-mahining of silicon and glass /

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Bibliographic Details
Main Authors: Venkatesh, V. C. (Vellore Chelvaraj), Izman Sudin, Safian Sharif, Mohamed Konneh, IEEE International Conference on Industrial Technology (2002 : Bangkok, Thailand)
Format:
Language:eng
Published: Skudai : Universiti Teknologi Malaysia, 2002
Subjects:
Grinding and polishing
Machining

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