Optical imaging in projection microlithography /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Bellingham, WA : SPIE Press,
2005
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| Subjects: |
| _version_ | 1796694434243411968 |
|---|---|
| author | 306713 Wong, Alfred Kwok-Kit |
| author_facet | 306713 Wong, Alfred Kwok-Kit |
| author_sort | 306713 Wong, Alfred Kwok-Kit |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T00:36:29Z |
| format | |
| id | KOHA-OAI-TEST:242339 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T00:36:29Z |
| publishDate | 2005 |
| publisher | Bellingham, WA : SPIE Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2423392020-12-19T17:07:28ZOptical imaging in projection microlithography / 306713 Wong, Alfred Kwok-Kit Bellingham, WA : SPIE Press,2005eng16PSZJBLMicrolithographyImaging systemsURN:ISBN:9780819458292 (pbk.) |
| spellingShingle | Microlithography Imaging systems 306713 Wong, Alfred Kwok-Kit Optical imaging in projection microlithography / |
| title | Optical imaging in projection microlithography / |
| title_full | Optical imaging in projection microlithography / |
| title_fullStr | Optical imaging in projection microlithography / |
| title_full_unstemmed | Optical imaging in projection microlithography / |
| title_short | Optical imaging in projection microlithography / |
| title_sort | optical imaging in projection microlithography |
| topic | Microlithography Imaging systems |
| work_keys_str_mv | AT 306713wongalfredkwokkit opticalimaginginprojectionmicrolithography |