Focused ion beam systems : basics and applications /
Includes bibliographical references and index
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
New York, NY : Cambridge University Press,
2007
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| Subjects: |
| _version_ | 1796696282720370688 |
|---|---|
| author | Yao, Nan |
| author_facet | Yao, Nan |
| author_sort | Yao, Nan |
| collection | OCEAN |
| description | Includes bibliographical references and index |
| first_indexed | 2024-03-05T01:02:00Z |
| format | |
| id | KOHA-OAI-TEST:250854 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T01:02:00Z |
| publishDate | 2007 |
| publisher | New York, NY : Cambridge University Press, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2508542020-12-19T17:07:51ZFocused ion beam systems : basics and applications / Yao, Nan New York, NY : Cambridge University Press,2007engIncludes bibliographical references and index40PSZJBLFocused ion beamsFocused ion beamsIon bombardmentURN:ISBN:9780521831994 (hbk.) |
| spellingShingle | Focused ion beams Focused ion beams Ion bombardment Yao, Nan Focused ion beam systems : basics and applications / |
| title | Focused ion beam systems : basics and applications / |
| title_full | Focused ion beam systems : basics and applications / |
| title_fullStr | Focused ion beam systems : basics and applications / |
| title_full_unstemmed | Focused ion beam systems : basics and applications / |
| title_short | Focused ion beam systems : basics and applications / |
| title_sort | focused ion beam systems basics and applications |
| topic | Focused ion beams Focused ion beams Ion bombardment |
| work_keys_str_mv | AT yaonan focusedionbeamsystemsbasicsandapplications |