Microlithography : science and technology /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Boca Raton, FL : CRC,
2007
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| Subjects: |
| _version_ | 1826406670996078592 |
|---|---|
| author | Suzuki, Kazuaki |
| author_facet | Suzuki, Kazuaki |
| author_sort | Suzuki, Kazuaki |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T01:05:03Z |
| format | |
| id | KOHA-OAI-TEST:251866 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T01:05:03Z |
| publishDate | 2007 |
| publisher | Boca Raton, FL : CRC, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2518662020-12-19T17:07:54ZMicrolithography : science and technology / Suzuki, Kazuaki Boca Raton, FL : CRC,2007eng16PSZJBLMicrolithographyIntegrated circuitsMetal oxide semiconductors, ComplementaryManufacturing processesURN:ISBN:9780824790240 (hbk.) |
| spellingShingle | Microlithography Integrated circuits Metal oxide semiconductors, Complementary Manufacturing processes Suzuki, Kazuaki Microlithography : science and technology / |
| title | Microlithography : science and technology / |
| title_full | Microlithography : science and technology / |
| title_fullStr | Microlithography : science and technology / |
| title_full_unstemmed | Microlithography : science and technology / |
| title_short | Microlithography : science and technology / |
| title_sort | microlithography science and technology |
| topic | Microlithography Integrated circuits Metal oxide semiconductors, Complementary Manufacturing processes |
| work_keys_str_mv | AT suzukikazuaki microlithographyscienceandtechnology |