Design of MEPCVD system for the preparation of thin film amorphous silicon /

Design of MEPCVD system for the preparation of thin film amorphous silicon /

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Bibliographische Detailangaben
Hauptverfasser: 177855 Putut Marwoto, Abdallah Belal Adam, Samsudi Sakrani, Bakar Ismail, Yusof Wahab, Universiti Teknologi Malaysia. Fakulti Sains. Jabatan Fizik, Regional Seminar on Solid State Science (15th : 1998 : Selangor)
Format:
Schlagworte:
Silicon
Thin films
Plasma-enhanced chemical vapor deposition

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