Recent progress and future prospect in ULSI process technology /
16
| Main Author: | |
|---|---|
| Format: | |
| Subjects: |
| _version_ | 1826408887232757760 |
|---|---|
| author | 369267 Masataka Hirose |
| author_facet | 369267 Masataka Hirose |
| author_sort | 369267 Masataka Hirose |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T01:37:23Z |
| format | |
| id | KOHA-OAI-TEST:262667 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T01:37:23Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2626672020-12-19T17:08:20ZRecent progress and future prospect in ULSI process technology / 369267 Masataka Hirose 16PSZJBLIntegrated circuits |
| spellingShingle | Integrated circuits 369267 Masataka Hirose Recent progress and future prospect in ULSI process technology / |
| title | Recent progress and future prospect in ULSI process technology / |
| title_full | Recent progress and future prospect in ULSI process technology / |
| title_fullStr | Recent progress and future prospect in ULSI process technology / |
| title_full_unstemmed | Recent progress and future prospect in ULSI process technology / |
| title_short | Recent progress and future prospect in ULSI process technology / |
| title_sort | recent progress and future prospect in ulsi process technology |
| topic | Integrated circuits |
| work_keys_str_mv | AT 369267masatakahirose recentprogressandfutureprospectinulsiprocesstechnology |