Field guide to optical lithography /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Bellingham, WA : SPIE Publications,
2006
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| Subjects: |
| _version_ | 1796699924023214080 |
|---|---|
| author | 372675 Mack, Chris A. |
| author_facet | 372675 Mack, Chris A. |
| author_sort | 372675 Mack, Chris A. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T01:52:55Z |
| format | |
| id | KOHA-OAI-TEST:267822 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T01:52:55Z |
| publishDate | 2006 |
| publisher | Bellingham, WA : SPIE Publications, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2678222020-12-19T17:08:32ZField guide to optical lithography / 372675 Mack, Chris A. Bellingham, WA : SPIE Publications,2006eng16PSZJBLIntegrated circuitsMicrolithographyURN:ISBN:9790819462076 (pbk.)URN:ISBN:0819462071 (pbk.) |
| spellingShingle | Integrated circuits Microlithography 372675 Mack, Chris A. Field guide to optical lithography / |
| title | Field guide to optical lithography / |
| title_full | Field guide to optical lithography / |
| title_fullStr | Field guide to optical lithography / |
| title_full_unstemmed | Field guide to optical lithography / |
| title_short | Field guide to optical lithography / |
| title_sort | field guide to optical lithography |
| topic | Integrated circuits Microlithography |
| work_keys_str_mv | AT 372675mackchrisa fieldguidetoopticallithography |