Simulation of etching process for IC fabrication /
Project Paper (Bachelor of Electrical Engineering (Electronics)) - Universiti Teknologi Malaysia, 2003
मुख्य लेखक: | |
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स्वरूप: | |
भाषा: | eng |
प्रकाशित: |
Skudai : Universiti Teknologi Malaysia,
2003
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विषय: |
_version_ | 1826410140144762880 |
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author | 442678 Wong, Kit Seong |
author_facet | 442678 Wong, Kit Seong |
author_sort | 442678 Wong, Kit Seong |
collection | OCEAN |
description | Project Paper (Bachelor of Electrical Engineering (Electronics)) - Universiti Teknologi Malaysia, 2003 |
first_indexed | 2024-03-05T01:55:43Z |
format | |
id | KOHA-OAI-TEST:268748 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T01:55:43Z |
publishDate | 2003 |
publisher | Skudai : Universiti Teknologi Malaysia, |
record_format | dspace |
spelling | KOHA-OAI-TEST:2687482020-12-19T17:08:35ZSimulation of etching process for IC fabrication / 442678 Wong, Kit Seong Skudai : Universiti Teknologi Malaysia,2003engProject Paper (Bachelor of Electrical Engineering (Electronics)) - Universiti Teknologi Malaysia, 2003Negative microfilm : MFL 13339 ra02PRZSLEtchingFabrication |
spellingShingle | Etching Fabrication 442678 Wong, Kit Seong Simulation of etching process for IC fabrication / |
title | Simulation of etching process for IC fabrication / |
title_full | Simulation of etching process for IC fabrication / |
title_fullStr | Simulation of etching process for IC fabrication / |
title_full_unstemmed | Simulation of etching process for IC fabrication / |
title_short | Simulation of etching process for IC fabrication / |
title_sort | simulation of etching process for ic fabrication |
topic | Etching Fabrication |
work_keys_str_mv | AT 442678wongkitseong simulationofetchingprocessforicfabrication |