Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method /
PRZSL
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Skudai : Universiti Teknologi Malaysia,
2008
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| _version_ | 1796700325188468736 |
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| author | Munawar Agus Riyadi, 1977-, author Ismail Saad, author Razali Ismail, author IEEE International Conference on Semiconductor Electronics (2008 : Johor) |
| author_facet | Munawar Agus Riyadi, 1977-, author Ismail Saad, author Razali Ismail, author IEEE International Conference on Semiconductor Electronics (2008 : Johor) |
| author_sort | Munawar Agus Riyadi, 1977-, author |
| collection | OCEAN |
| description | PRZSL |
| first_indexed | 2024-03-05T01:58:37Z |
| format | |
| id | KOHA-OAI-TEST:269719 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | |
| last_indexed | 2024-03-05T01:58:37Z |
| publishDate | 2008 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2697192020-12-19T17:08:37ZSilicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / Munawar Agus Riyadi, 1977-, author Ismail Saad, author Razali Ismail, author IEEE International Conference on Semiconductor Electronics (2008 : Johor) Skudai : Universiti Teknologi Malaysia,2008 PRZSL |
| spellingShingle | Munawar Agus Riyadi, 1977-, author Ismail Saad, author Razali Ismail, author IEEE International Conference on Semiconductor Electronics (2008 : Johor) Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title | Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title_full | Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title_fullStr | Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title_full_unstemmed | Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title_short | Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method / |
| title_sort | silicon pillar thickness effect on vertical double gate mosfet vdgm with oblique rotating implantation ori method |
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