Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method /

Silicon pillar thickness effect on vertical double gate MOSFET (VDGM) with oblique rotating implantation (ORI) method /

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Bibliographic Details
Main Authors:	Munawar Agus Riyadi, 1977-, author, Ismail Saad, author, Razali Ismail, author, IEEE International Conference on Semiconductor Electronics (2008 : Johor)
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Published:	Skudai : Universiti Teknologi Malaysia, 2008

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