Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies. Burlington, MA : William Andrew.
Cita Chicago (17th ed.)Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies. Burlington, MA : William Andrew, 2010.
Cita MLA (9th ed.)Lindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies. Burlington, MA : William Andrew, 2010.
Atenció: Aquestes cites poden no estar 100% correctes.