Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies. Burlington, MA : William Andrew.
Chicago Style (17. basım) AtıfLindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies. Burlington, MA : William Andrew, 2010.
MLA (9th ed.) AtıfLindroos, Veikko. Handbook of Silicon Based MEMS Materials and Technologies. Burlington, MA : William Andrew, 2010.
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