Handbook of silicon based MEMS materials and technologies /
16
| Главный автор: | |
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| Формат: | |
| Язык: | eng |
| Опубликовано: |
Burlington, MA : William Andrew,
2010
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| Предметы: |
| _version_ | 1826413320848015360 |
|---|---|
| author | Lindroos, Veikko |
| author_facet | Lindroos, Veikko |
| author_sort | Lindroos, Veikko |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T02:43:19Z |
| format | |
| id | KOHA-OAI-TEST:284661 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T02:43:19Z |
| publishDate | 2010 |
| publisher | Burlington, MA : William Andrew, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2846612020-12-19T17:09:15ZHandbook of silicon based MEMS materials and technologies / Lindroos, Veikko Burlington, MA : William Andrew,2010eng16PSZJBLMicroelectromechanical systemsMicroelectromechanical systemsSiliconURN:ISBN:9780815515944 (hbk.) |
| spellingShingle | Microelectromechanical systems Microelectromechanical systems Silicon Lindroos, Veikko Handbook of silicon based MEMS materials and technologies / |
| title | Handbook of silicon based MEMS materials and technologies / |
| title_full | Handbook of silicon based MEMS materials and technologies / |
| title_fullStr | Handbook of silicon based MEMS materials and technologies / |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies / |
| title_short | Handbook of silicon based MEMS materials and technologies / |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems Silicon |
| work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |