Handbook of silicon based MEMS materials and technologies /
16
Главный автор: | |
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Формат: | |
Язык: | eng |
Опубликовано: |
Burlington, MA : William Andrew,
2010
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Предметы: |
_version_ | 1826413320848015360 |
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author | Lindroos, Veikko |
author_facet | Lindroos, Veikko |
author_sort | Lindroos, Veikko |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-05T02:43:19Z |
format | |
id | KOHA-OAI-TEST:284661 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T02:43:19Z |
publishDate | 2010 |
publisher | Burlington, MA : William Andrew, |
record_format | dspace |
spelling | KOHA-OAI-TEST:2846612020-12-19T17:09:15ZHandbook of silicon based MEMS materials and technologies / Lindroos, Veikko Burlington, MA : William Andrew,2010eng16PSZJBLMicroelectromechanical systemsMicroelectromechanical systemsSiliconURN:ISBN:9780815515944 (hbk.) |
spellingShingle | Microelectromechanical systems Microelectromechanical systems Silicon Lindroos, Veikko Handbook of silicon based MEMS materials and technologies / |
title | Handbook of silicon based MEMS materials and technologies / |
title_full | Handbook of silicon based MEMS materials and technologies / |
title_fullStr | Handbook of silicon based MEMS materials and technologies / |
title_full_unstemmed | Handbook of silicon based MEMS materials and technologies / |
title_short | Handbook of silicon based MEMS materials and technologies / |
title_sort | handbook of silicon based mems materials and technologies |
topic | Microelectromechanical systems Microelectromechanical systems Silicon |
work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |