Handbook of silicon based MEMS materials and technologies /

16

Библиографические подробности
Главный автор: Lindroos, Veikko
Формат:
Язык:eng
Опубликовано: Burlington, MA : William Andrew, 2010
Предметы:
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author Lindroos, Veikko
author_facet Lindroos, Veikko
author_sort Lindroos, Veikko
collection OCEAN
description 16
first_indexed 2024-03-05T02:43:19Z
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T02:43:19Z
publishDate 2010
publisher Burlington, MA : William Andrew,
record_format dspace
spelling KOHA-OAI-TEST:2846612020-12-19T17:09:15ZHandbook of silicon based MEMS materials and technologies / Lindroos, Veikko Burlington, MA : William Andrew,2010eng16PSZJBLMicroelectromechanical systemsMicroelectromechanical systemsSiliconURN:ISBN:9780815515944 (hbk.)
spellingShingle Microelectromechanical systems
Microelectromechanical systems
Silicon
Lindroos, Veikko
Handbook of silicon based MEMS materials and technologies /
title Handbook of silicon based MEMS materials and technologies /
title_full Handbook of silicon based MEMS materials and technologies /
title_fullStr Handbook of silicon based MEMS materials and technologies /
title_full_unstemmed Handbook of silicon based MEMS materials and technologies /
title_short Handbook of silicon based MEMS materials and technologies /
title_sort handbook of silicon based mems materials and technologies
topic Microelectromechanical systems
Microelectromechanical systems
Silicon
work_keys_str_mv AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies