Handbook of silicon based MEMS materials and technologies /

Eitemau Tebyg

• The MEMS handbook /
  gan: Gad-el-Hak, Mohamed, 1945-
  Cyhoeddwyd: (2006)
• System-level modeling of MEMS /
  gan: Bechtold, T. (Tamara), et al.
  Cyhoeddwyd: (2013)
• Electroceramic-based MEMS : fabrication-technology and applications /
  gan: Setter, N. (Nava), 1949-
  Cyhoeddwyd: (2005)
• Advances in multiphysics simulation and experimental testing of MEMS /
  gan: Frangi, Attilio
  Cyhoeddwyd: (2008)
• MEMS /
  gan: 333975 Mahalik, Nitaigour Premchand
  Cyhoeddwyd: (2007)