Handbook of silicon based MEMS materials and technologies /

Handbook of silicon based MEMS materials and technologies /

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Bibliográfalaš dieđut
Váldodahkki: Lindroos, Veikko
Materiálatiipa:
Giella:eng
Almmustuhtton: Burlington, MA : William Andrew, 2010
Fáttát:
Microelectromechanical systems
Silicon

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