Handbook of silicon based MEMS materials and technologies /

Handbook of silicon based MEMS materials and technologies /

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Detaylı Bibliyografya
Yazar: Lindroos, Veikko
Materyal Türü:
Dil:eng
Baskı/Yayın Bilgisi: Burlington, MA : William Andrew, 2010
Konular:
Microelectromechanical systems
Silicon

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