Polycrystalline silicon for integrated circuit applications /
16
| Main Authors: | , |
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| Format: | |
| Published: |
Boston : Kluwer Academic Pub,
1988
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| Subjects: |
| _version_ | 1826360774116769792 |
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| author | 419225 Kamins, Theodore I. Kamins, Ted |
| author_facet | 419225 Kamins, Theodore I. Kamins, Ted |
| author_sort | 419225 Kamins, Theodore I. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T13:55:29Z |
| format | |
| id | KOHA-OAI-TEST:29031 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T13:55:29Z |
| publishDate | 1988 |
| publisher | Boston : Kluwer Academic Pub, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:290312020-12-19T16:56:33ZPolycrystalline silicon for integrated circuit applications / 419225 Kamins, Theodore I. Kamins, Ted Boston : Kluwer Academic Pub,198816PSZJBLIntegrated circuitsSiliconURN:ISBN:0898382599 |
| spellingShingle | Integrated circuits Silicon 419225 Kamins, Theodore I. Kamins, Ted Polycrystalline silicon for integrated circuit applications / |
| title | Polycrystalline silicon for integrated circuit applications / |
| title_full | Polycrystalline silicon for integrated circuit applications / |
| title_fullStr | Polycrystalline silicon for integrated circuit applications / |
| title_full_unstemmed | Polycrystalline silicon for integrated circuit applications / |
| title_short | Polycrystalline silicon for integrated circuit applications / |
| title_sort | polycrystalline silicon for integrated circuit applications |
| topic | Integrated circuits Silicon |
| work_keys_str_mv | AT 419225kaminstheodorei polycrystallinesiliconforintegratedcircuitapplications AT kaminsted polycrystallinesiliconforintegratedcircuitapplications |