Introduction to surface-micromachining /
20
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Boston : Kluwer Academic Publishers,
2004
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| Subjects: |
| _version_ | 1796706151546486784 |
|---|---|
| author | 203983 Johnstone, Robert W. Parameswaran, M |
| author_facet | 203983 Johnstone, Robert W. Parameswaran, M |
| author_sort | 203983 Johnstone, Robert W. |
| collection | OCEAN |
| description | 20 |
| first_indexed | 2024-03-05T03:19:45Z |
| format | |
| id | KOHA-OAI-TEST:296764 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T03:19:45Z |
| publishDate | 2004 |
| publisher | Boston : Kluwer Academic Publishers, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2967642020-12-19T17:09:47ZIntroduction to surface-micromachining / 203983 Johnstone, Robert W. Parameswaran, M Boston : Kluwer Academic Publishers,2004eng20PSZJBLMicromachiningURN:ISBN:1402080204 (hbk.) |
| spellingShingle | Micromachining 203983 Johnstone, Robert W. Parameswaran, M Introduction to surface-micromachining / |
| title | Introduction to surface-micromachining / |
| title_full | Introduction to surface-micromachining / |
| title_fullStr | Introduction to surface-micromachining / |
| title_full_unstemmed | Introduction to surface-micromachining / |
| title_short | Introduction to surface-micromachining / |
| title_sort | introduction to surface micromachining |
| topic | Micromachining |
| work_keys_str_mv | AT 203983johnstonerobertw introductiontosurfacemicromachining AT parameswaranm introductiontosurfacemicromachining |