Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence /
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Nagoya, Japan : NIFS,
1995
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विषय: |
_version_ | 1826416959664685056 |
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author | 402041 Yamamura, Y. Kazuho Sakaoka Hiro Tawara |
author_facet | 402041 Yamamura, Y. Kazuho Sakaoka Hiro Tawara |
author_sort | 402041 Yamamura, Y. |
collection | OCEAN |
description | 40 |
first_indexed | 2024-03-05T03:38:29Z |
format | |
id | KOHA-OAI-TEST:303009 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-05T03:38:29Z |
publishDate | 1995 |
publisher | Nagoya, Japan : NIFS, |
record_format | dspace |
spelling | KOHA-OAI-TEST:3030092020-12-19T17:10:04ZComputer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / 402041 Yamamura, Y. Kazuho Sakaoka Hiro Tawara Nagoya, Japan : NIFS,199540PSZJBLIon implantationSputtering (Physics) |
spellingShingle | Ion implantation Sputtering (Physics) 402041 Yamamura, Y. Kazuho Sakaoka Hiro Tawara Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title | Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title_full | Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title_fullStr | Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title_full_unstemmed | Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title_short | Computer simulation and data compilation of sputtering yield by hydrogen isotopes (1H+, 2D+, 3T+) and helium (4He+) ion impact from monatomic solids at normal incidence / |
title_sort | computer simulation and data compilation of sputtering yield by hydrogen isotopes 1h 2d 3t and helium 4he ion impact from monatomic solids at normal incidence |
topic | Ion implantation Sputtering (Physics) |
work_keys_str_mv | AT 402041yamamuray computersimulationanddatacompilationofsputteringyieldbyhydrogenisotopes1h2d3tandhelium4heionimpactfrommonatomicsolidsatnormalincidence AT kazuhosakaoka computersimulationanddatacompilationofsputteringyieldbyhydrogenisotopes1h2d3tandhelium4heionimpactfrommonatomicsolidsatnormalincidence AT hirotawara computersimulationanddatacompilationofsputteringyieldbyhydrogenisotopes1h2d3tandhelium4heionimpactfrommonatomicsolidsatnormalincidence |