Fundamentals of semiconductor fabrication /

16

Bibliographic Details
Main Authors: 269840 May, Gary S., Sze, S. M., 1936-
Format:
Language:eng
Published: Hoboken, N.J. : John Wiley & Sons, 2004
Subjects:
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author 269840 May, Gary S.
Sze, S. M., 1936-
author_facet 269840 May, Gary S.
Sze, S. M., 1936-
author_sort 269840 May, Gary S.
collection OCEAN
description 16
first_indexed 2024-03-05T03:40:26Z
format
id KOHA-OAI-TEST:303661
institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T03:40:26Z
publishDate 2004
publisher Hoboken, N.J. : John Wiley & Sons,
record_format dspace
spelling KOHA-OAI-TEST:3036612020-12-19T17:10:06ZFundamentals of semiconductor fabrication / 269840 May, Gary S. Sze, S. M., 1936- Hoboken, N.J. : John Wiley & Sons,2004eng16PSZJBLSemiconductorsIntegrated circuitsURN:ISBN:0471232793 (hbk.)
spellingShingle Semiconductors
Integrated circuits
269840 May, Gary S.
Sze, S. M., 1936-
Fundamentals of semiconductor fabrication /
title Fundamentals of semiconductor fabrication /
title_full Fundamentals of semiconductor fabrication /
title_fullStr Fundamentals of semiconductor fabrication /
title_full_unstemmed Fundamentals of semiconductor fabrication /
title_short Fundamentals of semiconductor fabrication /
title_sort fundamentals of semiconductor fabrication
topic Semiconductors
Integrated circuits
work_keys_str_mv AT 269840maygarys fundamentalsofsemiconductorfabrication
AT szesm1936 fundamentalsofsemiconductorfabrication