Fundamentals of semiconductor fabrication /
16
Main Authors: | , |
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Format: | |
Language: | eng |
Published: |
Hoboken, N.J. : John Wiley & Sons,
2004
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Subjects: |
_version_ | 1826417088488538112 |
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author | 269840 May, Gary S. Sze, S. M., 1936- |
author_facet | 269840 May, Gary S. Sze, S. M., 1936- |
author_sort | 269840 May, Gary S. |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-05T03:40:26Z |
format | |
id | KOHA-OAI-TEST:303661 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T03:40:26Z |
publishDate | 2004 |
publisher | Hoboken, N.J. : John Wiley & Sons, |
record_format | dspace |
spelling | KOHA-OAI-TEST:3036612020-12-19T17:10:06ZFundamentals of semiconductor fabrication / 269840 May, Gary S. Sze, S. M., 1936- Hoboken, N.J. : John Wiley & Sons,2004eng16PSZJBLSemiconductorsIntegrated circuitsURN:ISBN:0471232793 (hbk.) |
spellingShingle | Semiconductors Integrated circuits 269840 May, Gary S. Sze, S. M., 1936- Fundamentals of semiconductor fabrication / |
title | Fundamentals of semiconductor fabrication / |
title_full | Fundamentals of semiconductor fabrication / |
title_fullStr | Fundamentals of semiconductor fabrication / |
title_full_unstemmed | Fundamentals of semiconductor fabrication / |
title_short | Fundamentals of semiconductor fabrication / |
title_sort | fundamentals of semiconductor fabrication |
topic | Semiconductors Integrated circuits |
work_keys_str_mv | AT 269840maygarys fundamentalsofsemiconductorfabrication AT szesm1936 fundamentalsofsemiconductorfabrication |