Fundamentals of semiconductor fabrication /
16
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Hoboken, N.J. : John Wiley & Sons,
2004
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| Subjects: |
| _version_ | 1826417088488538112 |
|---|---|
| author | 269840 May, Gary S. Sze, S. M., 1936- |
| author_facet | 269840 May, Gary S. Sze, S. M., 1936- |
| author_sort | 269840 May, Gary S. |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T03:40:26Z |
| format | |
| id | KOHA-OAI-TEST:303661 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T03:40:26Z |
| publishDate | 2004 |
| publisher | Hoboken, N.J. : John Wiley & Sons, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3036612020-12-19T17:10:06ZFundamentals of semiconductor fabrication / 269840 May, Gary S. Sze, S. M., 1936- Hoboken, N.J. : John Wiley & Sons,2004eng16PSZJBLSemiconductorsIntegrated circuitsURN:ISBN:0471232793 (hbk.) |
| spellingShingle | Semiconductors Integrated circuits 269840 May, Gary S. Sze, S. M., 1936- Fundamentals of semiconductor fabrication / |
| title | Fundamentals of semiconductor fabrication / |
| title_full | Fundamentals of semiconductor fabrication / |
| title_fullStr | Fundamentals of semiconductor fabrication / |
| title_full_unstemmed | Fundamentals of semiconductor fabrication / |
| title_short | Fundamentals of semiconductor fabrication / |
| title_sort | fundamentals of semiconductor fabrication |
| topic | Semiconductors Integrated circuits |
| work_keys_str_mv | AT 269840maygarys fundamentalsofsemiconductorfabrication AT szesm1936 fundamentalsofsemiconductorfabrication |