Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films /
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| Main Authors: | , , , |
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| Format: | |
| Language: | eng |
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Skudai : Universiti Teknologi Malaysia,
2003
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| Subjects: |
| _version_ | 1796708312106926080 |
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| author | 203186 Hasbullah A. Hasbi Zulkafli Othman Samsudi Sakrani International Conference on Advancement in Science and Technology (2003 : Kuala Lumpur) |
| author_facet | 203186 Hasbullah A. Hasbi Zulkafli Othman Samsudi Sakrani International Conference on Advancement in Science and Technology (2003 : Kuala Lumpur) |
| author_sort | 203186 Hasbullah A. Hasbi |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-05T03:49:44Z |
| format | |
| id | KOHA-OAI-TEST:306747 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T03:49:44Z |
| publishDate | 2003 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3067472020-12-19T17:10:15ZInfrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / 203186 Hasbullah A. Hasbi Zulkafli Othman Samsudi Sakrani International Conference on Advancement in Science and Technology (2003 : Kuala Lumpur) Skudai : Universiti Teknologi Malaysia,2003eng4012PSZJBLSilicon-carbide thin filmWide gap semiconductorsRaman spectroscopy |
| spellingShingle | Silicon-carbide thin film Wide gap semiconductors Raman spectroscopy 203186 Hasbullah A. Hasbi Zulkafli Othman Samsudi Sakrani International Conference on Advancement in Science and Technology (2003 : Kuala Lumpur) Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title | Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title_full | Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title_fullStr | Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title_full_unstemmed | Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title_short | Infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films / |
| title_sort | infrared and raman studies of radio frequency sputtered hydrogenated amorphous silicon carbide thin films |
| topic | Silicon-carbide thin film Wide gap semiconductors Raman spectroscopy |
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