Properties of tantalum sputtered films /
42
| Main Authors: | , |
|---|---|
| Format: | |
| Subjects: |
| _version_ | 1796709836263522304 |
|---|---|
| author | 8426 Gerstenberg, D. Mayer, E. H. |
| author_facet | 8426 Gerstenberg, D. Mayer, E. H. |
| author_sort | 8426 Gerstenberg, D. |
| collection | OCEAN |
| description | 42 |
| first_indexed | 2024-03-05T04:12:26Z |
| format | |
| id | KOHA-OAI-TEST:314222 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T04:12:26Z |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3142222020-12-19T17:10:34ZProperties of tantalum sputtered films / 8426 Gerstenberg, D. Mayer, E. H. 42PSZJBLTantalum films |
| spellingShingle | Tantalum films 8426 Gerstenberg, D. Mayer, E. H. Properties of tantalum sputtered films / |
| title | Properties of tantalum sputtered films / |
| title_full | Properties of tantalum sputtered films / |
| title_fullStr | Properties of tantalum sputtered films / |
| title_full_unstemmed | Properties of tantalum sputtered films / |
| title_short | Properties of tantalum sputtered films / |
| title_sort | properties of tantalum sputtered films |
| topic | Tantalum films |
| work_keys_str_mv | AT 8426gerstenbergd propertiesoftantalumsputteredfilms AT mayereh propertiesoftantalumsputteredfilms |