MEMS mechanical sensors /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Boston, MA : Artech House,
2004
|
| Subjects: |
| _version_ | 1796711577349521408 |
|---|---|
| author | Beeby, Stephen |
| author_facet | Beeby, Stephen |
| author_sort | Beeby, Stephen |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T04:38:07Z |
| format | |
| id | KOHA-OAI-TEST:322886 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T04:38:07Z |
| publishDate | 2004 |
| publisher | Boston, MA : Artech House, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3228862020-12-19T17:10:54ZMEMS mechanical sensors / Beeby, Stephen Boston, MA : Artech House,2004eng16PSZJBLMicroelectromechanical systemsDetectorsURN:ISBN:1580535364 (hbk.) |
| spellingShingle | Microelectromechanical systems Detectors Beeby, Stephen MEMS mechanical sensors / |
| title | MEMS mechanical sensors / |
| title_full | MEMS mechanical sensors / |
| title_fullStr | MEMS mechanical sensors / |
| title_full_unstemmed | MEMS mechanical sensors / |
| title_short | MEMS mechanical sensors / |
| title_sort | mems mechanical sensors |
| topic | Microelectromechanical systems Detectors |
| work_keys_str_mv | AT beebystephen memsmechanicalsensors |