The modelling of transport phenomena in the PECVD reactor /

Bibliographic Details
Main Authors:	235319 Samsudi Sakrani, Imam Sumpono, Annual Fundamental Science Seminar (2nd : 2005 : Johor Bahru)
Format:
Language:	eng
Published:	Skudai : Universiti Teknologi Malaysia, 2005
Subjects:	Thin films

Description
Summary:	40

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