Handbook of contamination control in microelectronics : principles applications and technology/
15
| Main Author: | |
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| Format: | |
| Published: |
Park Ridge, NJ : Noyes Data,
1988
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| Subjects: |
| _version_ | 1796715811362045952 |
|---|---|
| author | Tolliver, Donald L. |
| author_facet | Tolliver, Donald L. |
| author_sort | Tolliver, Donald L. |
| collection | OCEAN |
| description | 15 |
| first_indexed | 2024-03-05T05:40:35Z |
| format | |
| id | KOHA-OAI-TEST:343665 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-05T05:40:35Z |
| publishDate | 1988 |
| publisher | Park Ridge, NJ : Noyes Data, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3436652020-12-19T17:11:40ZHandbook of contamination control in microelectronics : principles applications and technology/ Tolliver, Donald L. Park Ridge, NJ : Noyes Data,198815PSZJBLIntegrated circuitsContamination (Technology)URN:ISBN:0815511515 |
| spellingShingle | Integrated circuits Contamination (Technology) Tolliver, Donald L. Handbook of contamination control in microelectronics : principles applications and technology/ |
| title | Handbook of contamination control in microelectronics : principles applications and technology/ |
| title_full | Handbook of contamination control in microelectronics : principles applications and technology/ |
| title_fullStr | Handbook of contamination control in microelectronics : principles applications and technology/ |
| title_full_unstemmed | Handbook of contamination control in microelectronics : principles applications and technology/ |
| title_short | Handbook of contamination control in microelectronics : principles applications and technology/ |
| title_sort | handbook of contamination control in microelectronics principles applications and technology |
| topic | Integrated circuits Contamination (Technology) |
| work_keys_str_mv | AT tolliverdonaldl handbookofcontaminationcontrolinmicroelectronicsprinciplesapplicationsandtechnology |