Foundations of MEMS /
16
| Κύριος συγγραφέας: | |
|---|---|
| Μορφή: | |
| Γλώσσα: | eng |
| Έκδοση: |
Upper Saddle River, NJ : Pearson Prentice Hall,
2006
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| Θέματα: |
| _version_ | 1826425967188377600 |
|---|---|
| author | 355913 Liu, Chang |
| author_facet | 355913 Liu, Chang |
| author_sort | 355913 Liu, Chang |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T05:53:57Z |
| format | |
| id | KOHA-OAI-TEST:348130 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T05:53:57Z |
| publishDate | 2006 |
| publisher | Upper Saddle River, NJ : Pearson Prentice Hall, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3481302020-12-19T17:12:02ZFoundations of MEMS / 355913 Liu, Chang Upper Saddle River, NJ : Pearson Prentice Hall,2006eng16PSZJBLMicroelectromechanical systemsURN:ISBN:0131472860 (hbk.) |
| spellingShingle | Microelectromechanical systems 355913 Liu, Chang Foundations of MEMS / |
| title | Foundations of MEMS / |
| title_full | Foundations of MEMS / |
| title_fullStr | Foundations of MEMS / |
| title_full_unstemmed | Foundations of MEMS / |
| title_short | Foundations of MEMS / |
| title_sort | foundations of mems |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT 355913liuchang foundationsofmems |