Gettering defects in semiconductors /

Gettering defects in semiconductors /

16

Detalhes bibliográficos
Main Authors:	386064 Perevostchikov V. A., Skoupov, V. D.
Formato:
Idioma:	eng
Publicado em:	Berlin ; Springer Verlag, 2005
Assuntos:	Semiconductors Getters Silicon crystals Electric engineering

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