vacuum technology, thin films and sputtering : an introduction/
51
| Main Author: | |
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| Format: | |
| Published: |
orlando : Academic Pr.,
1983
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| Subjects: |
| _version_ | 1826362202313981952 |
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| author | 461798 Stuart, R. V. |
| author_facet | 461798 Stuart, R. V. |
| author_sort | 461798 Stuart, R. V. |
| collection | OCEAN |
| description | 51 |
| first_indexed | 2024-03-04T14:16:35Z |
| format | |
| id | KOHA-OAI-TEST:36066 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T14:16:35Z |
| publishDate | 1983 |
| publisher | orlando : Academic Pr., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:360662020-12-19T16:57:17Zvacuum technology, thin films and sputtering : an introduction/ 461798 Stuart, R. V. orlando : Academic Pr.,198351PSZJBLVacuum technologyThin filmsCathode sputtering (Plating process)URN:ISBN:0126747806 |
| spellingShingle | Vacuum technology Thin films Cathode sputtering (Plating process) 461798 Stuart, R. V. vacuum technology, thin films and sputtering : an introduction/ |
| title | vacuum technology, thin films and sputtering : an introduction/ |
| title_full | vacuum technology, thin films and sputtering : an introduction/ |
| title_fullStr | vacuum technology, thin films and sputtering : an introduction/ |
| title_full_unstemmed | vacuum technology, thin films and sputtering : an introduction/ |
| title_short | vacuum technology, thin films and sputtering : an introduction/ |
| title_sort | vacuum technology thin films and sputtering an introduction |
| topic | Vacuum technology Thin films Cathode sputtering (Plating process) |
| work_keys_str_mv | AT 461798stuartrv vacuumtechnologythinfilmsandsputteringanintroduction |