Scanning electron microscopy for failure analysis of integrated circuits /
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| Main Authors: | , , , |
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| Format: | |
| Language: | eng |
| Published: |
Serdang : Universiti Putra Malaysia,
1997
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| Subjects: |
| _version_ | 1796719582794219520 |
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| author | 276078 R Wagiran B. Y. Majlis N. M. Zain IEEE National Symposium on Microelectronics (1997 : Universiti Kebangsaan Malaysia, Bangi) |
| author_facet | 276078 R Wagiran B. Y. Majlis N. M. Zain IEEE National Symposium on Microelectronics (1997 : Universiti Kebangsaan Malaysia, Bangi) |
| author_sort | 276078 R Wagiran |
| collection | OCEAN |
| description | 42 |
| first_indexed | 2024-03-05T06:35:06Z |
| format | |
| id | KOHA-OAI-TEST:361841 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T06:35:06Z |
| publishDate | 1997 |
| publisher | Serdang : Universiti Putra Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3618412020-12-19T17:12:34ZScanning electron microscopy for failure analysis of integrated circuits / 276078 R Wagiran B. Y. Majlis N. M. Zain IEEE National Symposium on Microelectronics (1997 : Universiti Kebangsaan Malaysia, Bangi) Serdang : Universiti Putra Malaysia,1997eng4250PSZJBLScanning electron microscopes |
| spellingShingle | Scanning electron microscopes 276078 R Wagiran B. Y. Majlis N. M. Zain IEEE National Symposium on Microelectronics (1997 : Universiti Kebangsaan Malaysia, Bangi) Scanning electron microscopy for failure analysis of integrated circuits / |
| title | Scanning electron microscopy for failure analysis of integrated circuits / |
| title_full | Scanning electron microscopy for failure analysis of integrated circuits / |
| title_fullStr | Scanning electron microscopy for failure analysis of integrated circuits / |
| title_full_unstemmed | Scanning electron microscopy for failure analysis of integrated circuits / |
| title_short | Scanning electron microscopy for failure analysis of integrated circuits / |
| title_sort | scanning electron microscopy for failure analysis of integrated circuits |
| topic | Scanning electron microscopes |
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