Scanning electron microscopy for failure analysis of integrated circuits /

Scanning electron microscopy for failure analysis of integrated circuits /

42

Bibliographic Details
Main Authors:	276078 R Wagiran, B. Y. Majlis, N. M. Zain, IEEE National Symposium on Microelectronics (1997 : Universiti Kebangsaan Malaysia, Bangi)
Format:
Language:	eng
Published:	Serdang : Universiti Putra Malaysia, 1997
Subjects:	Scanning electron microscopes

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