Plasma electronics : applications in microelectronic device fabrication /
40
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
New York, NY: Taylor & Francis,
2006
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| Subjects: |
| _version_ | 1796652258966896640 |
|---|---|
| author | Makabe, T. (Toshiaki) Petrovic, Z. |
| author_facet | Makabe, T. (Toshiaki) Petrovic, Z. |
| author_sort | Makabe, T. (Toshiaki) |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-04T14:18:03Z |
| format | |
| id | KOHA-OAI-TEST:36561 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T14:18:03Z |
| publishDate | 2006 |
| publisher | New York, NY: Taylor & Francis, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:365612020-12-19T16:57:19ZPlasma electronics : applications in microelectronic device fabrication / Makabe, T. (Toshiaki) Petrovic, Z. New York, NY: Taylor & Francis,2006eng40PSZJBLPlasma engineeringURN:ISBN:0750309768 (hbk.) |
| spellingShingle | Plasma engineering Makabe, T. (Toshiaki) Petrovic, Z. Plasma electronics : applications in microelectronic device fabrication / |
| title | Plasma electronics : applications in microelectronic device fabrication / |
| title_full | Plasma electronics : applications in microelectronic device fabrication / |
| title_fullStr | Plasma electronics : applications in microelectronic device fabrication / |
| title_full_unstemmed | Plasma electronics : applications in microelectronic device fabrication / |
| title_short | Plasma electronics : applications in microelectronic device fabrication / |
| title_sort | plasma electronics applications in microelectronic device fabrication |
| topic | Plasma engineering |
| work_keys_str_mv | AT makabettoshiaki plasmaelectronicsapplicationsinmicroelectronicdevicefabrication AT petrovicz plasmaelectronicsapplicationsinmicroelectronicdevicefabrication |