Modelling of microfabrication systems /

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Detalhes bibliográficos
Principais autores: 183324 Nassar, Raja, Dai, Weizhong
Formato:
Idioma:eng
Publicado em: Berlin : Springer, 2003
Assuntos:
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author 183324 Nassar, Raja
Dai, Weizhong
author_facet 183324 Nassar, Raja
Dai, Weizhong
author_sort 183324 Nassar, Raja
collection OCEAN
description 16
first_indexed 2024-03-05T07:04:45Z
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T07:04:45Z
publishDate 2003
publisher Berlin : Springer,
record_format dspace
spelling KOHA-OAI-TEST:3717142020-12-19T17:12:55ZModelling of microfabrication systems / 183324 Nassar, Raja Dai, Weizhong Berlin : Springer,2003eng16PSZJBLMicroelectronicsIntegrated circuitsMicroelectromechanical systemsURN:ISBN:3540002529 (hbk.)
spellingShingle Microelectronics
Integrated circuits
Microelectromechanical systems
183324 Nassar, Raja
Dai, Weizhong
Modelling of microfabrication systems /
title Modelling of microfabrication systems /
title_full Modelling of microfabrication systems /
title_fullStr Modelling of microfabrication systems /
title_full_unstemmed Modelling of microfabrication systems /
title_short Modelling of microfabrication systems /
title_sort modelling of microfabrication systems
topic Microelectronics
Integrated circuits
Microelectromechanical systems
work_keys_str_mv AT 183324nassarraja modellingofmicrofabricationsystems
AT daiweizhong modellingofmicrofabricationsystems