Modelling of microfabrication systems /
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Principais autores: | , |
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Formato: | |
Idioma: | eng |
Publicado em: |
Berlin : Springer,
2003
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Assuntos: |
_version_ | 1826430720739901440 |
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author | 183324 Nassar, Raja Dai, Weizhong |
author_facet | 183324 Nassar, Raja Dai, Weizhong |
author_sort | 183324 Nassar, Raja |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-05T07:04:45Z |
format | |
id | KOHA-OAI-TEST:371714 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T07:04:45Z |
publishDate | 2003 |
publisher | Berlin : Springer, |
record_format | dspace |
spelling | KOHA-OAI-TEST:3717142020-12-19T17:12:55ZModelling of microfabrication systems / 183324 Nassar, Raja Dai, Weizhong Berlin : Springer,2003eng16PSZJBLMicroelectronicsIntegrated circuitsMicroelectromechanical systemsURN:ISBN:3540002529 (hbk.) |
spellingShingle | Microelectronics Integrated circuits Microelectromechanical systems 183324 Nassar, Raja Dai, Weizhong Modelling of microfabrication systems / |
title | Modelling of microfabrication systems / |
title_full | Modelling of microfabrication systems / |
title_fullStr | Modelling of microfabrication systems / |
title_full_unstemmed | Modelling of microfabrication systems / |
title_short | Modelling of microfabrication systems / |
title_sort | modelling of microfabrication systems |
topic | Microelectronics Integrated circuits Microelectromechanical systems |
work_keys_str_mv | AT 183324nassarraja modellingofmicrofabricationsystems AT daiweizhong modellingofmicrofabricationsystems |