Modelling of microfabrication systems /
16
| Principais autores: | , |
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| Formato: | |
| Idioma: | eng |
| Publicado em: |
Berlin : Springer,
2003
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| Assuntos: |
| _version_ | 1826430720739901440 |
|---|---|
| author | 183324 Nassar, Raja Dai, Weizhong |
| author_facet | 183324 Nassar, Raja Dai, Weizhong |
| author_sort | 183324 Nassar, Raja |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T07:04:45Z |
| format | |
| id | KOHA-OAI-TEST:371714 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T07:04:45Z |
| publishDate | 2003 |
| publisher | Berlin : Springer, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3717142020-12-19T17:12:55ZModelling of microfabrication systems / 183324 Nassar, Raja Dai, Weizhong Berlin : Springer,2003eng16PSZJBLMicroelectronicsIntegrated circuitsMicroelectromechanical systemsURN:ISBN:3540002529 (hbk.) |
| spellingShingle | Microelectronics Integrated circuits Microelectromechanical systems 183324 Nassar, Raja Dai, Weizhong Modelling of microfabrication systems / |
| title | Modelling of microfabrication systems / |
| title_full | Modelling of microfabrication systems / |
| title_fullStr | Modelling of microfabrication systems / |
| title_full_unstemmed | Modelling of microfabrication systems / |
| title_short | Modelling of microfabrication systems / |
| title_sort | modelling of microfabrication systems |
| topic | Microelectronics Integrated circuits Microelectromechanical systems |
| work_keys_str_mv | AT 183324nassarraja modellingofmicrofabricationsystems AT daiweizhong modellingofmicrofabricationsystems |