Modelling of microfabrication systems /

Modelling of microfabrication systems /

16

Detalhes bibliográficos
Principais autores:	183324 Nassar, Raja, Dai, Weizhong
Formato:
Idioma:	eng
Publicado em:	Berlin : Springer, 2003
Assuntos:	Microelectronics Integrated circuits Microelectromechanical systems

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